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Viser: Microsystem Design

Microsystem Design

Microsystem Design

Stephen D. Senturia
(2000)
Sprog: Engelsk
Springer
1.551,00 kr.
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Detaljer om varen

  • Hardback: 720 sider
  • Udgiver: Springer (November 2000)
  • ISBN: 9780792372462
Based on his graduate course Design and Fabrication of Microelectromechanical Systems, Senturia (Massachusetts Institute of Technology) assembles in a single text the fundamentals of the many disciplines needed by microsystem engineers. He demonstrates the principles of good design with a set of case studies, mostly of real products, but when necessary of thoroughly published prototype work. He used up all his class homework problems as worked-out examples for the book, and has only partly replaced them with new ones, but promises more on the Web. Between introductory matters and case studies, he covers modeling strategies, domain-specific details, and circuit and system issues. c. Book News Inc.
Getting Started.- An Approach to Mems Design.- Microfabrication.- Process Integation.- Modeling Strategies.- Lumped Modeling with Circuit Elements.- Energy-conserving Transducers.- Lumped-element System Dynamics.- Domain-Specific Details.- Elasticity.- Structures.- Energy Methods.- Dissipation and the Thermal Energy Domain.- Lumped Modeling of Dissipative Processes.- Fluids.- Circuit and System Issues.- Electronics.- Feedback Systems.- Noise.- Case Studies.- Packaging.- A Piezoresistive Pressure Sensor.- A Capacitive Accelerometer.- Electrostatic Projection Displays.- A Piezoelectric Rate Gyroscope.- Microsystems for DNA Amplification.- A Microbridge Combustible-gas Sensor.
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