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Preface xiii Acknowledgments xvii 1 Introduction 1
1.1 Micropositioning Techniques 1
1.2 Compliant Guiding Mechanisms 2
1.2.1 Basic Flexure Hinges 2
1.2.2 Translational Flexure Hinges 3
1.2.3 Translational Positioning Mechanisms 4
1.2.4 Rotational Positioning Mechanisms 8
1.2.5 Multi-Stroke Positioning Mechanisms 10
1.3 Actuation and Sensing 11
1.4 Control Issues 12
1.5 Book Outline 14 References 14
Part I LARGE-RANGE TRANSLATIONAL MICROPOSITIONING SYSTEMS 2 Uniaxial Flexure Stage 21
2.1 Concept of MCPF 21
2.1.1 Limitation of Conventional Flexures 21
2.1.2 Proposal of MCPF 23
2.2 Design of a Large-Range Flexure Stage 25
2.2.1 Mechanism Design 25
2.2.2 Analytical Modeling 26
2.2.3 Architecture Optimization 29
2.2.4 Structure Improvement 31
2.3 Prototype Development and Performance Testings 33
2.3.1 Statics Performance Testing 34
2.3.2 Dynamics Performance Testing 35
2.4 Sliding Mode Controller Design 35
2.4.1 Dynamics Modeling 35
2.4.2 DSMC Design 36
2.5 Experimental Studies 38
2.5.1 Plant Model Identification 38
2.5.2 Controller Setup 39
2.5.3 Set-Point Positioning Results 39
2.5.4 Sinusoidal Positioning Results 41
2.6 Conclusion 42 References 44 3 XY Flexure Stage 45
3.1 Introduction 45
3.2 XY Stage Design 46
3.2.1 Decoupled XY Stage Design with MCPF 46
3.2.2 Buckling/Bending Effect Consideration 49
3.2.3 Actuation Issues 51
3.3 Model Verification and Prototype Development 52
3.3.1 Performance Assessment with FEA Simulation 52
3.3.2 Prototype Fabrication 54
3.3.3 Open-Loop Experimental Results 54
3.4 EMPC Control Scheme Design 55
3.4.1 Problem Formulation 56
3.4.2 EMPC Scheme Design 57
3.4.3 State Observer Design 60
3.4.4 Tracking Error Analysis 61
3.5 Simulation and Experimental Studies 61
3.5.1 Plant Model Identification 61
3.5.2 Controller Parameter Design 64
3.5.3 Simulation Studies and Discussion 64
3.5.4 Experimental Results and Discussion 66
3.6 Conclusion 67 References 69 4 Two-Layer XY Flexure Stage 70
4.1 Introduction 70
4.2 Mechanism Design 71
4.2.1 Design of a Two-Layer XY Stage with MCPF 71
4.2.2 Structure Improvement of the XY Stage 72
4.3 Parametric Design 73
4.3.1 Motion Range Design 73
4.3.2 Stiffness and Actuation Force Design 74
4.3.3 Critical Load of Buckling 75
4.3.4 Resonant Frequency 75
4.3.5 Out-of-Plane Payload Capability 76
4.3.6 Influences of Manufacturing Tolerance 77
4.4 Experimental Studies and Results 79
4.4.1 Prototype Development 80
4.4.2 Statics Performance Testing 80
4.4.3 Dynamics Performance Testing 81
4.4.4 Positioning Performance Testing 83
4.4.5 Contouring Performance Testing 84
4.4.6 Control Bandwidth Testing 86
4.4.7 Discussion and Future Work 88
4.5 Conclusion 89 References 89
Part II MULTI-STROKE TRANSLATIONAL MICROPOSITIONING SYSTEMS 5 Dual-Stroke Uniaxial Flexure Stage 93
5.1 Introduction 93
5.2 Mechanism Design and Analysis 94
5.2.1 Mechanism Design to Minimize Interference Behavior 94
5.2.2 Mechanism Design to Achieve Large Stroke 99
5.2.3 FEA Simulation and Design Improvement 101
5.3 Prototype Development and Open-Loop Testing 104
5.3.1 Experimental Setup 106
5.3.2 Statics Performance Testing 106
5.3.3 Dynamics Performance Testing 107
5.4 Controller Design and Experimental Studies 109
5.4.1 Controller Design 109
5.4.2 Experimental Studies 110
5.5 Conclusion 111 References 113 6 Dual-Stroke, Dual-Resolution Uniaxial Flexure Stage 114
6.1 Introduction 114
6.2 Conceptual Design 115
6.2.1 Design of a Compliant Stage with Dual Ranges 115
6.2.2 Design of a Compliant Stage with Dual Resolutions 116
6.3 Mechanism Design 117
6.3.1 Stiffness Calculation 118
6.3.2 Motion Range Design 119
6.3.3 Motor Stroke and Driving Force Requirement 120
6.3.4 Sensor Deployment 121
6.4 Performance Evaluation 123
6.4.1 Analytical Model Results 123
6.4.2 FEA Simulation Results 124
6.5 Prototype Development and Experimental Studies 125
6.5.1 Prototype Development 126
6.5.2 Statics Performance Testing 127
6.5.3 Dynamics Performance Testing 129
6.5.4 Further Discussion 131
6.6 Conclusion 133 References 133 7 Multi-Stroke, Multi-Resolution XY Flexure Stage 135
7.1 Introduction 135
7.2 Conceptual Design 136
7.2.1 Design of Flexure Stage with Multiple Strokes 136
7.2.2 Design of Flexure Stage with Multiple Resolutions 138
7.3 Flexure-Based Compliant Mechanism Design 139
7.3.1 Compliant Element Selection 139
7.3.2 Design of a Two-Axis Stage 140
7.4 Parametric Design 141
7.4.1 Design of Motion Strokes 141
7.4.2 Design of Coarse/Fine Sensor Resolution Ratio 144
7.4.3 Actuation Issue Consideration 145
7.5 Stage Performance Assessment 146
7.5.1 Analytical Model Evaluation Results 146
7.5.2 FEA Simulation Results 146
7.6 Prototype Development and Experimental Studies 149
7.6.1 Prototype Development 149
7.6.2 Statics Performance Testing 150
7.6.3 Dynamics Performance Testing 154
7.6.4 Circular Contouring Testing 156
7.6.5 Discussion 156
7.7 Conclusion 159 References 159
Part III LARGE-RANGE ROTATIONAL MICROPOSITIONING SYSTEMS 8 Rotational Stage with Linear Drive 163
8.1 Introduction 163
8.2 Design of MCRF 164
8.2.1 Limitation of Conventional Radial Flexures 164
8.2.2 Proposal of MCRF 165
8.2.3 Analytical Models 166
8.3 Design of a Rotary Stage with MCRF 169
8.3.1 Consideration of Actuation Issues 170
8.3.2 Consideration of Sensing Issues 172
8.4 Performance Evaluation with FEA Simulation 172
8.4.1 Analytical Model Results 172
8.4.2 FEA Simulation Results 173
8.4.3 Structure Improvement 175
8.5 Prototype Development and Experimental Studies 176
8.5.1 Prototype Development 176
8.5.2 Open-Loop Performance Testing 177
8.5.3 Controller Design and Closed-Loop Performance Testing 178
8.5.4 Further Discussion 181
8.6 Conclusion 183 References 184 9 Rotational Stage with Rotary Drive 185
9.1 Introduction 185
9.2 New Design of MCRF 186
9.2.1 MCRF Design 186
9.2.2 Analytical Model Not Considering Deformation 187
9.2.3 Analytical Model Considering Deformation 189
9.3 Design of the Rotary Stage 192
9.3.1 Actuator Selection 194
9.3.2 Sensor Design 194
9.4 Performance Evaluation with FEA Simulation 196
9.4.1 Analytical Model Results 197
9.4.2 FEA Simulation Results 197
9.5 Prototype Fabrication and Experimental Testing 201
9.5.1 Prototype Development 201
9.5.2 Statics Performance Testing 202
9.5.3 Dynamics Performance Testing 206
9.5.4 Discussion 206
9.6 Conclusion 207 References 208
Part IV APPLICATIONS TO COMPLIANT GRIPPER DESIGN 10 Large-Range Rotary Gripper 213
10.1 Introduction 213
10.1.1 Structure Design and Driving Method 213
10.1.2 Sensing Requirements 214
10.2 Mechanism Design and Analysis 216
10.2.1 Actuation Issues 216
10.2.2 Position and Force Sensing Issues 218
10.3 Performance Evaluation with FEA Simulation 222
10.3.1 Analytical Model Results 222
10.3.2 FEA Simulation Results 222
10.4 Prototype Development and Calibration 227
10.4.1 Prototype Development 227
10.4.2 Calibration of Position Sensor 228
10.4.3 Calibration of Force Sensor 229
10.4.4 Verification of Force Sensor 230
10.4.5 Consistency Testing of the Sensors 231
10.5 Performance Testing Results 232
10.5.1 Testing of Gripping Sensing Performance 232
10.5.2 Testing of Horizontal Interaction Detection 235
10.5.3 Testing of Vertical Interaction Detection 236
10.5.4 Testing of Dynamics Performance 237
10.5.5 Applications to Pick-Transport-Place in Assembly 238
10.5.6 Further Discussion 239
10.6 Conclusion 242 References 242 11 MEMS Rotary Gripper 244
11.1 Introduction 244
11.2 MEMS Gripper Design 245
11.2.1 Actuator Design 246
11.2.2 Sensor Design 249
11.3 Performance Evaluation with FEA Simulation 251
11.3.1 Statics Analysis 252
11.3.2 Dynamics Analysis 254
11.4 Gripper Fabrication 254
11.5 Experimental Results and Discussion 255
11.5.1 Gripping Range Testing Results 255
11.5.2 Gripping Force Testing Results 258
11.5.3 Interaction Force Testing Results 260
11.5.4 Demonstration of Micro-object Gripping 261
11.5.5 Further Discussion 262
11.6 Conclusion 264 References 266 Index 267